2 件のレコードが見つかりました。
Predicting the surface roughness of an electrodeposited copper film using a machine learning technique
- 論文
- 著者
-
Ryo Tamura
;
Ryuichi Inaba
;
Mami Watanabe
;
Yutaro Mori
;
Makoto Urushihara
;
Kenji Yamaguchi
;
Shoichi Matsuda
- キーワード
- electrodeposited copper film, surface roughness, machine learning
- 刊行年月日
- 2024-12-31
- 更新時刻
- 2024-10-31 16:30:15 +0900
Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy, Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering
- 論文
- 著者
-
OGIWARA, Toshiya
;
TANUMA, Shigeo
- キーワード
- depth resolution function, InP/GaInAsP multilayer specimens, Auger depth profiling analysis, surface roughness, atomic force microscope
- 刊行年月日
- 2011-06-10
- 更新時刻
- 2022-10-03 01:24:02 +0900