2 records found.
Predicting the surface roughness of an electrodeposited copper film using a machine learning technique
- Article
- Creator
-
Ryo Tamura
;
Ryuichi Inaba
;
Mami Watanabe
;
Yutaro Mori
;
Makoto Urushihara
;
Kenji Yamaguchi
;
Shoichi Matsuda
- Keyword
- electrodeposited copper film, surface roughness, machine learning
- Date published
- 2024-12-31
- Updated at
- 2024-10-31 16:30:15 +0900
Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy, Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering
- Article
- Creator
-
OGIWARA, Toshiya
;
TANUMA, Shigeo
- Keyword
- depth resolution function, InP/GaInAsP multilayer specimens, Auger depth profiling analysis, surface roughness, atomic force microscope
- Date published
- 2011-06-10
- Updated at
- 2022-10-03 01:24:02 +0900