Arイオンスパッタリングされた各種化合物半導体表面のSEM観察

Article

Creator

Ogiwara, Toshiya ; Tanuma, Shigeo

Keyword

argon ion sputtering, compound semiconductor, surface observation using a scanning electron microscope

Date published

1995-03-08

Updated at

2022-10-03 01:31:38 +0900