Growth and etching characteristics of (001) β- Ga2O3 by plasma-assisted molecular beam epitaxy

Journal article

Creator

Yuichi Oshima (author) (Search by this author)

https://orcid.org/0000-0001-8293-4891

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Yuichi Oshima ;

Elaheh Ahmadi (author) (Search by this author)

https://orcid.org/0000-0002-8330-9366 (unauthenticated)

Elaheh Ahmadi ;

Stephen Kaun (author) (Search by this author)

Stephen Kaun ;

Feng Wu (author) (Search by this author)

Feng Wu ;

James S Speck (author) (Search by this author)

James S Speck

Keyword

β-Ga2O3, MBE

Date published

2018-01-01

Updated at

2024-01-22 09:42:02 +0900