Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy. Effects of Zalar Rotation and Liquid Nitrogen Cold Stage

Article

Creator

Ogiwara, Toshiya ; Tanuma, Shigeo ; Nagasawa, Yuji ; Ikeo, Nobuyuki

Keyword

Auger Depth Profiling Analysis, InP/GaInAsP Multilayers, Zalar Rotation Method, Sample Cooling Method

Date published

2011-06-10

Updated at

2022-10-03 01:53:08 +0900