Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam

Article

Creator

OGIWARA, Toshiya ; HARADA, Tomoko ; TANUMA, Shigeo

Keyword

Auger Depth Profiling Analysis, InP/GaInAsP Multilayer Specimen, Argon Ion Spot Beam

Date published

2011-06-10

Updated at

2022-10-03 02:04:45 +0900