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Keyword: Hybrid bonding
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2 records found.

JAFOE.pdf
Surface Modification for High Reliability and Reversible Hybrid Interconnection
Poster
Creator
Akitsu Shigetou SAMURAI ORCID
Keyword
Hybrid bonding, Cu, Solid state debonding
Date published
Updated at
2026-01-21 09:20:22 +0900

250430 NY S U draft.pdf
Surface Modification for High-Reliability and Multi-Functional Hybrid Interconnections
Presentation
Creator
Akitsu Shigetou SAMURAI ORCID
Keyword
Low temperature bonding, Electronics packaging, VUV, Hybrid bonding
Date published
Updated at
2026-01-20 17:12:48 +0900

Keyword
  • Hybrid bonding (2)
  • Cu (1)
  • Electronics packaging (1)
  • Low temperature bonding (1)
  • Solid state debonding (1)
  • VUV (1)
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