Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy, Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering

Article

Creator

OGIWARA, Toshiya ; TANUMA, Shigeo

Keyword

depth resolution function, InP/GaInAsP multilayer specimens, Auger depth profiling analysis, surface roughness, atomic force microscope

Date published

2011-06-10

Updated at

2022-10-03 01:24:02 +0900