Resource type: journal_article Keyword: atomic layer deposition
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2 records found.

Adv Funct Materials - 2025 - Byloff - From Mechanics to Electronics Influence of ALD Interlayers on the Multiaxial.pdf
From Mechanics to Electronics: Influence of ALD Interlayers on the Multiaxial Electro‐Mechanical Behavior of Metal–Oxide Bilayers
Article
Creator
Johanna Byloff ORCID ; Vivek Devulapalli ORCID ; Daniele Casari ORCID ; Thomas E. J. Edwards SAMURAI ORCID ; Claus O. W. Trost ORCID ; Megan J. Cordill ORCID ; Shuhel Altaf Husain ORCID ; Pierre‐Olivier Renault ORCID ; Damien Faurie ORCID ; Barbara Putz ORCID
Keyword
atomic layer deposition, electromechanical properties, flexible polymer substrates, tensile testing, thin films
Date published
2025-11-27
Updated at
2026-01-20 11:54:44 +0900
ChemMater36_6139_2024.pdf
Effects of Plasma Reactants on Atomic Layer Deposition of Lithium Phosphate and Lithium Phosphorus Oxynitride Electrolyte Films
Article
Creator
Tohru Tsuruoka SAMURAI ORCID ; Samapika Mallik ORCID ; Takuji Tsujita ; Yuu Inatomi ; Kazuya Terabe SAMURAI ORCID
Keyword
atomic layer deposition, lithium phosphate, lithium phosphorus oxynitride, solid-state electrolyte, plasma reactant
Date published
2024-06-25
Updated at
2025-06-25 08:30:22 +0900