Resource type: journal_article Keyword: InP/GaInAsP Multilayer Specimen
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表面科学_13_1992_595.pdf
Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam
Article
Creator
OGIWARA, Toshiya SAMURAI ORCID ; HARADA, Tomoko ; TANUMA, Shigeo SAMURAI ORCID
Keyword
Auger Depth Profiling Analysis, InP/GaInAsP Multilayer Specimen, Argon Ion Spot Beam
Date published
2011-06-10
Updated at
2022-10-03 02:04:45 +0900