Resource type: journal_article Keyword: HCl gas etching
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2 records found.

055207_1_5.0260753-2-8.pdf
Fabrication of air bridges on (100) β-Ga2O3 using crystallographic HCl gas etching
Article
Creator
Takayoshi Oshima SAMURAI ORCID ; Yuichi Oshima SAMURAI ORCID
Keyword
Ga2O3, HCl gas etching, air bridge
Date published
2025-05-01
Updated at
2025-05-07 12:30:22 +0900
APEX-107351.docx
Anisotropic non-plasma HCl gas etching of (010) β-Ga2O3 substrate
Article
Creator
Takayoshi Oshima SAMURAI ORCID ; Yuichi Oshima SAMURAI ORCID
Keyword
Ga2O3, HCl gas etching
Date published
2023-06-01
Updated at
2024-06-15 08:30:13 +0900