Keyword: HVPE

3 records found.

J_Appl_Phys_139_075302_(2026).pdf
Halide vapor phase epitaxy of a thick c -plane α-Ga2O3 film on a high-quality α-Cr2O3/sapphire template
Journal article
Creator
ORCID SAMURAI ; ORCID SAMURAI ;
Shiyu Xiao (author) (Search by this author)
ORCID ;
Kazuto Murakami (author) (Search by this author)
;
Katsuhiro Imai (author) (Search by this author)
;
Takahiro Tomita (author) (Search by this author)
Keyword
Ga2O3, HVPE, Cr2O3
Date published
2026-02-21
Updated at
2026-02-18 16:30:15 +0900

Epitaxial lateral overgrowth of r-plane α-Ga2O3 with stripe masks along .pdf
Epitaxial lateral overgrowth of r-plane α-Ga2O3 with stripe masks along -12-10>
Journal article
Creator
Yuichi Oshima (author) (Search by this author)
ORCID SAMURAI ;
Shingo Yagyu (author) (Search by this author)
;
Takashi Shinohe (author) (Search by this author)
Keyword
α-Ga2O3, HVPE, dislocation, ELO
Date published
2021-11-07
Updated at
2024-01-30 16:49:49 +0900

BGO(-102)HVPE_full_230811_clean.pdf
Homoepitaxial growth of (-102) β-Ga2O3 by halide vapor phase epitaxy
Journal article
Creator
Yuichi Oshima (author) (Search by this author)
ORCID SAMURAI ;
Takayoshi Oshima (author) (Search by this author)
ORCID SAMURAI
Keyword
β-Ga2O3, HVPE
Date published
2023-10-01
Updated at
2024-08-31 08:31:17 +0900