Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam

Journal article

Creator

OGIWARA, Toshiya (author) (Search by this author)

https://orcid.org/0000-0002-7376-6571

NIMS Researchers Directory SAMURAI

OGIWARA, Toshiya ;

HARADA, Tomoko (author) (Search by this author)

HARADA, Tomoko ;

TANUMA, Shigeo (author) (Search by this author)

https://orcid.org/0000-0003-2628-9941

NIMS Researchers Directory SAMURAI

TANUMA, Shigeo

Keyword

Auger Depth Profiling Analysis, InP/GaInAsP Multilayer Specimen, Argon Ion Spot Beam

Date published

2011-06-10

Updated at

2022-10-03 02:04:45 +0900