Visualization of threading dislocations in an α-Ga2O3 epilayer by HCl gas etching

Journal article

Creator

Yuichi Oshima (author) (Search by this author)

https://orcid.org/0000-0001-8293-4891

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Yuichi Oshima ;

Shingo Yagyu (author) (Search by this author)

Shingo Yagyu ;

Takashi Shinohe (author) (Search by this author)

Takashi Shinohe

Keyword

α-Ga2O3, dislocation, etching

Date published

2021-10-19

Updated at

2024-01-22 09:38:31 +0900