Keyword: nanoelectronics
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s41467-018-06524-3.pdf
Atomically precise graphene etch stops for three dimensional integrated systems from two dimensional material heterostructures
Journal article
Creator
Jangyup Son (author) (Search by this author)
University of Illinois at Urbana-Champaign
;
Junyoung Kwon (author) (Search by this author)
Yonsei University
;
SunPhil Kim (author) (Search by this author)
University of Illinois at Urbana-Champaign
;
Yinchuan Lv (author) (Search by this author)
University of Illinois at Urbana-Champaign
;
Jaehyung Yu (author) (Search by this author)
University of Illinois at Urbana-Champaign
;
Jong-Young Lee (author) (Search by this author)
Yonsei University
;
Huije Ryu (author) (Search by this author)
Yonsei University
;
Kenji Watanabe (author) (Search by this author)
Research Center for Functional Materials/Electric and Electronic Materials Field/Electroceramics Group, National Institute for Materials Science
ORCID SAMURAI ;
Takashi Taniguchi (author) (Search by this author)
Research Center for Functional Materials/Exploring Function Field/High Pressure Group, National Institute for Materials Science
ORCID SAMURAI ;
Rita Garrido-Menacho (author) (Search by this author)
University of Illinois at Urbana-Champaign
;
Nadya Mason (author) (Search by this author)
University of Illinois at Urbana-Champaign
;
Elif Ertekin (author) (Search by this author)
University of Illinois at Urbana-Champaign
;
Pinshane Y. Huang (author) (Search by this author)
University of Illinois at Urbana-Champaign
;
Gwan-Hyoung Lee (author) (Search by this author)
Yonsei University
;
Arend van der Zande (author) (Search by this author)
University of Illinois at Urbana-Champaign
Keyword
Atomically precise fabrication, graphene etch stop, nanoelectronics
Date published
2018-09-28
Updated at
2025-02-23 22:50:05 +0900