Article Atomically precise graphene etch stops for three dimensional integrated systems from two dimensional material heterostructures

Jangyup Son (University of Illinois at Urbana-Champaign) ; Junyoung Kwon (Yonsei University) ; SunPhil Kim (University of Illinois at Urbana-Champaign) ; Yinchuan Lv (University of Illinois at Urbana-Champaign) ; Jaehyung Yu (University of Illinois at Urbana-Champaign) ; Jong-Young Lee (Yonsei University) ; Huije Ryu (Yonsei University) ; Kenji Watanabe SAMURAI ORCID (Research Center for Functional Materials/Electric and Electronic Materials Field/Electroceramics Group, National Institute for Materials Science) ; Takashi Taniguchi SAMURAI ORCID (Research Center for Functional Materials/Exploring Function Field/High Pressure Group, National Institute for Materials Science) ; Rita Garrido-Menacho (University of Illinois at Urbana-Champaign) ; Nadya Mason (University of Illinois at Urbana-Champaign) ; Elif Ertekin (University of Illinois at Urbana-Champaign) ; Pinshane Y. Huang (University of Illinois at Urbana-Champaign) ; Gwan-Hyoung Lee (Yonsei University) ; Arend van der Zande (University of Illinois at Urbana-Champaign)

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Jangyup Son, Junyoung Kwon, SunPhil Kim, Yinchuan Lv, Jaehyung Yu, Jong-Young Lee, Huije Ryu, Kenji Watanabe, Takashi Taniguchi, Rita Garrido-Menacho, Nadya Mason, Elif Ertekin, Pinshane Y. Huang, Gwan-Hyoung Lee, Arend van der Zande. Atomically precise graphene etch stops for three dimensional integrated systems from two dimensional material heterostructures. NATURE COMMUNICATIONS. 2018, 9 (), 3988.
SAMURAI

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(abstract)

We demonstrate the novel use of monolayer graphene as a highly selective etch mask in van der Waals (vdW) heterostructures and application in nanoelectronic and nanomechanical devices. With the exception of graphene, most 2D materials are etched through exposure to XeF2 gas. In contrast, graphene is fluorinated into highly resistive and gas impermeable fluorographene. By burying graphene within stacked heterostructures of other 2D materials, this unconventional etching selectivity allows one-step patterning of sophisticated devices within the heterostructures by using the graphene as one-atom-thick etch mask or etch stop. This technique enables atomic-precision in etch depth without precise control of etch time or process parameters, yet also works on chip-scale patterned arrays.

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Keyword: Atomically precise fabrication, graphene etch stop, nanoelectronics

Date published: 2018-09-28

Publisher: Springer Science and Business Media LLC

Journal:

  • NATURE COMMUNICATIONS (ISSN: 20411723) vol. 9 3988

Funding:

  • NSF | Directorate for Mathematical & Physical Sciences | Division of Materials Research 1720633
  • National Research Foundation of Korea NRF-2017R1A2B2006568
  • National Research Foundation of Korea 2017R1A5A1014862
  • MEXT | NINS | Institute for Molecular Science JP15K21722

Manuscript type: Publisher's version (Version of record)

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First published URL: https://doi.org/10.1038/s41467-018-06524-3

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Updated at: 2025-02-23 22:50:05 +0900

Published on MDR: 2025-02-23 22:50:05 +0900

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