@misc{jangyup2018a,
  title = {Atomically precise graphene etch stops for three dimensional integrated systems from two dimensional material heterostructures},
  author = {Jangyup Son, Junyoung Kwon, SunPhil Kim, Yinchuan Lv, Jaehyung Yu, Jong-Young Lee, Huije Ryu, Kenji Watanabe, Takashi Taniguchi, Rita Garrido-Menacho, Nadya Mason, Elif Ertekin, Pinshane Y. Huang, Gwan-Hyoung Lee, Arend van der Zande},
  publisher = {Springer Science and Business Media LLC},
  year = {2018-09-28},
  keywords = {Atomically precise fabrication, graphene etch stop, nanoelectronics}
}