Keyword: etching

2 records found.

2310.03143v1.pdf
1D Crystallographic Etching of Few‐Layer WS2
Journal article
Creator
ORCID ;
Yung‐Chang Lin (author) (Search by this author)
ORCID ;
Yiling Chiew (author) (Search by this author)
;
Yunyun Dai (author) (Search by this author)
;
Zixuan Ning (author) (Search by this author)
;
Yaming Zhang (author) (Search by this author)
;
Hideaki Nakajima (author) (Search by this author)
;
Hong En Lim (author) (Search by this author)
;
Jing Wu (author) (Search by this author)
;
Yasuhisa Neitoh (author) (Search by this author)
;
Toshiya Okazaki (author) (Search by this author)
;
Yang Sun (author) (Search by this author)
;
Zhipei Sun (author) (Search by this author)
;
Kazu Suenaga (author) (Search by this author)
;
Yoshiki Sakuma (author) (Search by this author)
ORCID SAMURAI ;
Kazuhito Tsukagoshi (author) (Search by this author)
ORCID SAMURAI ;
Takaaki Taniguchi (author) (Search by this author)
ORCID SAMURAI
Keyword
1D nanotrenches, etching, photoluminescence, second harmonic generation, transition metal dichalcogenides
Date published
2024-10-03
Updated at
2024-11-20 16:30:24 +0900

162102_1_5.0138736.pdf
Plasma-free dry etching of (001) β-Ga2O3 substrates by HCl gas
Journal article
Creator
Takayoshi Oshima (author) (Search by this author)
ORCID SAMURAI ;
Yuichi Oshima (author) (Search by this author)
ORCID SAMURAI
Keyword
Ga2O3, etching, HCl
Date published
2023-04-17
Updated at
2024-05-29 08:30:12 +0900