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Resource type
Journal article(2)
Keyword
etching (2)
1D nanotrenches (1)
Ga2O3 (1)
HCl (1)
photoluminescence (1)
second harmonic generation (1)
transition metal dichalcogenides (1)
(more)
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Creative Commons BY Attribution 4.0 International (1)
In Copyright (1)
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application/pdf (2)
Keyword: etching
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2 records found.
1D Crystallographic Etching of Few‐Layer WS
2
Journal article
Creator
Shisheng Li
(author) (
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)
https://orcid.org/0000-0001-9301-5559
Shisheng Li
;
Yung‐Chang Lin
(author) (
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)
https://orcid.org/0000-0002-3968-7239
(unauthenticated)
Yung‐Chang Lin
;
Yiling Chiew
(author) (
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)
Yiling Chiew
;
Yunyun Dai
(author) (
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)
Yunyun Dai
;
Zixuan Ning
(author) (
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)
Zixuan Ning
;
Yaming Zhang
(author) (
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)
Yaming Zhang
;
Hideaki Nakajima
(author) (
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)
Hideaki Nakajima
;
Hong En Lim
(author) (
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)
Hong En Lim
;
Jing Wu
(author) (
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)
Jing Wu
;
Yasuhisa Neitoh
(author) (
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)
Yasuhisa Neitoh
;
Toshiya Okazaki
(author) (
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)
Toshiya Okazaki
;
Yang Sun
(author) (
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)
Yang Sun
;
Zhipei Sun
(author) (
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)
Zhipei Sun
;
Kazu Suenaga
(author) (
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)
Kazu Suenaga
;
Yoshiki Sakuma
(author) (
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)
https://orcid.org/0000-0001-6804-7217
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Yoshiki Sakuma
;
Kazuhito Tsukagoshi
(author) (
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)
https://orcid.org/0000-0001-9710-2692
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Kazuhito Tsukagoshi
;
Takaaki Taniguchi
(author) (
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)
https://orcid.org/0000-0002-8460-5431
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Takaaki Taniguchi
Keyword
1D nanotrenches
,
etching
,
photoluminescence
,
second harmonic generation
,
transition metal dichalcogenides
Date published
2024-10-03
Updated at
2024-11-20 16:30:24 +0900
Plasma-free dry etching of (001) β-Ga2O3 substrates by HCl gas
Journal article
Creator
Takayoshi Oshima
(author) (
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)
https://orcid.org/0000-0001-8550-9735
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Yuichi Oshima
(author) (
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)
https://orcid.org/0000-0001-8293-4891
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Yuichi Oshima
Keyword
Ga2O3
,
etching
,
HCl
Date published
2023-04-17
Updated at
2024-05-29 08:30:12 +0900
Keyword
etching
(2)
1D nanotrenches
(1)
Ga2O3
(1)
HCl
(1)
photoluminescence
(1)
second harmonic generation
(1)
transition metal dichalcogenides
(1)
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