Epitaxial lateral overgrowth of r-plane α-Ga2O3 with stripe masks along -12-10>

Journal article

Creator

Yuichi Oshima (author) (Search by this author)

https://orcid.org/0000-0001-8293-4891

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Yuichi Oshima ;

Shingo Yagyu (author) (Search by this author)

Shingo Yagyu ;

Takashi Shinohe (author) (Search by this author)

Takashi Shinohe

Keyword

α-Ga2O3, HVPE, dislocation, ELO

Date published

2021-11-07

Updated at

2024-01-30 16:49:49 +0900