Epitaxial growth of phase-pure e-Ga2O3 by halide vapor phase epitaxy

Journal article

Creator

Yuichi Oshima (author) (Search by this author)

https://orcid.org/0000-0001-8293-4891

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Yuichi Oshima ;

Encarnación G. Víllora (author) (Search by this author)

Encarnación G. Víllora ;

Yoshitaka Matsushita (author) (Search by this author)

https://orcid.org/0000-0002-4968-8905

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Yoshitaka Matsushita ;

Satoshi Yamamoto (author) (Search by this author)

https://orcid.org/0000-0002-1171-7723

National Institute for Materials Science

Satoshi Yamamoto ;

Kiyoshi Shimamura (author) (Search by this author)

https://orcid.org/0000-0001-6502-8731

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Kiyoshi Shimamura

Keyword

κ-Ga2O3, ε-Ga2O3, HVPE

Date published

2015-08-28

Updated at

2024-01-30 15:45:38 +0900