Keyword: MEMS

3 records found.

041124_1_5.0250902-min.pdf
High-order resonance enhancing the mass sensitivity of diamond cantilevers
Journal article
Creator
Wen Zhao (author) (Search by this author)
ORCID ;
Guo Chen (author) (Search by this author)
ORCID ;
Keyun Gu (author) (Search by this author)
ORCID ;
Masaya Toda (author) (Search by this author)
; ORCID SAMURAI ; ORCID SAMURAI
Keyword
Diamond, MEMS
Date published
2025-04-01
Updated at
2025-07-12 08:30:35 +0900

30-Manuscript-WEN_2025-Liao 20250114.docx
Ultra‐High Sensitivity, Wide‐Range Thermometry Based on High‐Quality Microscale Diamond Resonators
Journal article
Creator
Wen Zhao (author) (Search by this author)
ORCID ;
Guo Chen (author) (Search by this author)
ORCID ; ORCID SAMURAI ;
Yasuo Koide (author) (Search by this author)
;
Masaya Toda (author) (Search by this author)
; ORCID SAMURAI
Keyword
Diamond, MEMS
Date published
2025-07-28
Updated at
2025-10-28 12:30:23 +0900

AFM-resonator_sensor-20230307 .pdf
On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film
Journal article
Creator
Zilong Zhang (author) (Search by this author)
National Institute for Materials Science
ORCID ;
Wen Zhao (author) (Search by this author)
;
Guo Chen (author) (Search by this author)
National Institute for Materials Science
;
Masaya Toda (author) (Search by this author)
;
Satoshi Koizumi (author) (Search by this author)
ORCID SAMURAI ;
Yasuo Koide (author) (Search by this author)
ORCID SAMURAI ;
Meiyong Liao (author) (Search by this author)
ORCID SAMURAI
Keyword
Diamond, MEMS, Magnetic sensors
Date published
2023-03-27
Updated at
2024-07-04 16:30:34 +0900