3 records found.
Fabrication of β -Ga 2 O 3 /air-gap structures on (010) β -Ga 2 O 3 by wet etching in tetramethylammonium hydroxide (TMAH)
- Journal article
- Creator
-
Takayoshi Oshima (author) (Search by this author)
- Keyword
- Ga2O3, TMAH, wet etching, MEMS
- Date published
- 2025-11-01
- Updated at
- 2025-11-27 08:30:13 +0900
Fabrication of β-Ga 2 O 3 /air-gap structures on (001) β-Ga 2 O 3 using HCl gas etching
- Journal article
- Creator
-
Takayoshi Oshima (author) (Search by this author)
;
Yuichi Oshima (author) (Search by this author)
- Keyword
- β-Ga2O3, cantilever, air bridge, MEMS
- Date published
- 2025-12-31
- Updated at
- 2025-09-04 12:30:25 +0900
High-order resonance enhancing the mass sensitivity of diamond cantilevers
- Journal article
- Creator
-
Wen Zhao (author) (Search by this author)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
;
Guo Chen (author) (Search by this author)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
;
Keyun Gu (author) (Search by this author)
https://orcid.org/0000-0002-7505-7744
(unauthenticated)
;
;Masaya Toda (author) (Search by this author)Yasuo Koide (author) (Search by this author)
;
Meiyong Liao (author) (Search by this author)
- Keyword
- Diamond, MEMS
- Date published
- 2025-04-01
- Updated at
- 2025-07-12 08:30:35 +0900