Developing nickel-catalyzed graphene/diamond heterostructures for MEMS applications
- Conference presentation
- Creator
-
Guo Chen (author) (Search by this author)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Wen Zhao (author) (Search by this author)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Zhaozong Zhang (author) (Search by this author)
https://orcid.org/0009-0003-8745-4469
(unauthenticated)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Satoshi KOIZUMI (author) (Search by this author)Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Meiyong Liao (author) (Search by this author)Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
- Keyword
- Diamond, MEMS
- Date published
- Updated at
- 2025-11-06 12:30:32 +0900
20.1 A 3.5×3.5mm2 1.47mW/ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal-Gas-Sensor Chip Stack
- Journal article
- Creator
-
;Kotaro Naruse (author) (Search by this author);Naru Kato (author) (Search by this author);Takuma Matsumori (author) (Search by this author);Jun Shlomi (author) (Search by this author);Yoshihiro Midoh (author) (Search by this author);Tetsuya Hirose (author) (Search by this author)Gaku Imamura (author) (Search by this author)National Institute for Materials Science
;
Genki Yoshikawa (author) (Search by this author)National Institute for Materials Science
;
;Constantine Sideris (author) (Search by this author)Noriyuki Miura (author) (Search by this author)
- Keyword
- gas sensor, CMOS, MEMS
- Date published
- 2025-02-16
- Updated at
- 2025-12-25 16:21:05 +0900