Higher-order resonance of single-crystal diamond cantilever sensors toward high f‧Q products

Journal article

Creator

Guo Chen (author) (Search by this author)

Guo Chen ;

Zilong Zhang (author) (Search by this author)

https://orcid.org/0000-0002-9759-9253

National Institute for Materials Science

Zilong Zhang ;

Keyun Gu (author) (Search by this author)

Keyun Gu ;

Liwen Sang (author) (Search by this author)

https://orcid.org/0000-0003-0946-1025

National Institute for Materials Science

Liwen Sang ;

Satoshi Koizumi (author) (Search by this author)

https://orcid.org/0000-0003-4961-5658

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Satoshi Koizumi ;

Masaya Toda (author) (Search by this author)

Masaya Toda ;

Haitao Ye (author) (Search by this author)

Haitao Ye ;

Yasuo Koide (author) (Search by this author)

https://orcid.org/0000-0001-8321-9822

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Yasuo Koide ;

Zhaohui Huang (author) (Search by this author)

Zhaohui Huang ;

Meiyong Liao (author) (Search by this author)

https://orcid.org/0000-0003-1361-4266

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Meiyong Liao

Keyword

Diamond, MEMS

Date published

2024-02-01

Updated at

2024-08-31 08:30:32 +0900