Elimination of threading dislocations in α-Ga2O3 by double layered epitaxial lateral overgrowth

ジャーナル論文

著者

Katsuaki Kawara (author) (この著者で検索)

Katsuaki Kawara ;

Yuichi Oshima (author) (この著者で検索)

https://orcid.org/0000-0001-8293-4891

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Yuichi Oshima ;

Mitsuru Okigawa (author) (この著者で検索)

Mitsuru Okigawa ;

Takashi Shinohe (author) (この著者で検索)

Takashi Shinohe

キーワード

α-Ga2O3, dislocation, ELO

刊行年月日

2020-07-01

更新時刻

2024-01-22 09:40:04 +0900