Disclosing the annihilation effect of ion-implantation induced defects in single-crystal diamond by resonant MEMS

ジャーナル論文

著者

Guo Chen (author) (この著者で検索)

Guo Chen ;

Zilong Zhang (author) (この著者で検索)

Zilong Zhang ;

Yasuo Koide (author) (この著者で検索)

Yasuo Koide ;

Satoshi Koizumi (author) (この著者で検索)

Satoshi Koizumi ;

Zhaohui Huang (author) (この著者で検索)

Zhaohui Huang ;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Meiyong Liao

キーワード

Diamond, MEMS

刊行年月日

2023-07-26

更新時刻

2025-07-26 08:30:34 +0900