Epitaxial lateral overgrowth of m -plane α-Ga ₂ O ₃ by halide vapor phase epitaxy

Journal article

Creator

Yuichi Oshima (author) (Search by this author)

https://orcid.org/0000-0001-8293-4891

NIMS Researchers Directory SAMURAI

Yuichi Oshima ;

Takashi Shinohe (author) (Search by this author)

https://orcid.org/0009-0000-5559-1432 (unauthenticated)

Takashi Shinohe

Keyword

Ga2O3, dislocation, ELO, HVPE

Date published

2025-12-31

Updated at

2025-04-23 12:30:12 +0900