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Auger depth profiling analysis (8)
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Raw data files for Fig. 11 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7376-6571
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
OGIWARA, Toshiya
;
NAGATA, Takahiro
(author) (
この著者で検索
)
https://orcid.org/0000-0002-8591-2943
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
NAGATA, Takahiro
;
YOSHIKAWA, Hideki
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7389-8865
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
YOSHIKAWA, Hideki
キーワード
Auger depth profiling analysis
,
HfO2/Si
,
Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-04-07 22:57:41 +0900
Raw data files for Fig. 10 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7376-6571
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
OGIWARA, Toshiya
;
NAGATA, Takahiro
(author) (
この著者で検索
)
https://orcid.org/0000-0002-8591-2943
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
NAGATA, Takahiro
;
YOSHIKAWA, Hideki
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7389-8865
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
YOSHIKAWA, Hideki
キーワード
Auger depth profiling analysis
,
HfO2/Si
,
Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-01-05 22:12:41 +0900
Raw data files for Fig. 9 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7376-6571
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
OGIWARA, Toshiya
;
NAGATA, Takahiro
(author) (
この著者で検索
)
https://orcid.org/0000-0002-8591-2943
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
NAGATA, Takahiro
;
YOSHIKAWA, Hideki
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7389-8865
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
YOSHIKAWA, Hideki
キーワード
Auger depth profiling analysis
,
HfO2/Si
,
Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-10-08 12:20:27 +0900
Raw data files for Fig. 5 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7376-6571
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
OGIWARA, Toshiya
;
NAGATA, Takahiro
(author) (
この著者で検索
)
https://orcid.org/0000-0002-8591-2943
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
NAGATA, Takahiro
;
YOSHIKAWA, Hideki
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7389-8865
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
YOSHIKAWA, Hideki
キーワード
Auger depth profiling analysis
,
HfO2/Si
,
Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-03-30 18:50:38 +0900
Raw data files for Fig. 6 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7376-6571
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
OGIWARA, Toshiya
;
NAGATA, Takahiro
(author) (
この著者で検索
)
https://orcid.org/0000-0002-8591-2943
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
NAGATA, Takahiro
;
YOSHIKAWA, Hideki
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7389-8865
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
YOSHIKAWA, Hideki
キーワード
Auger depth profiling analysis
,
HfO2/Si
,
Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-03-30 18:50:25 +0900
Raw data files for Fig. 7 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7376-6571
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
OGIWARA, Toshiya
;
NAGATA, Takahiro
(author) (
この著者で検索
)
https://orcid.org/0000-0002-8591-2943
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
NAGATA, Takahiro
;
YOSHIKAWA, Hideki
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7389-8865
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
YOSHIKAWA, Hideki
キーワード
Auger depth profiling analysis
,
HfO2/Si
,
Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-01-05 22:12:25 +0900
Raw data files for Fig. 8 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7376-6571
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
OGIWARA, Toshiya
;
NAGATA, Takahiro
(author) (
この著者で検索
)
https://orcid.org/0000-0002-8591-2943
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
NAGATA, Takahiro
;
YOSHIKAWA, Hideki
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7389-8865
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
YOSHIKAWA, Hideki
キーワード
Auger depth profiling analysis
,
HfO2/Si
,
Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-01-05 22:11:29 +0900
Machine extraction of polymer data from tables using XML versions of scientific articles
データセット
著者
YOSHIZAWA, Atsushi
(author) (
この著者で検索
)
YOSHIZAWA, Atsushi
;
ISHII, Masashi
(author) (
この著者で検索
)
https://orcid.org/0000-0003-0357-2832
NIMS Researchers Directory SAMURAI
ISHII, Masashi
;
SHINDO, Hiroyuki
(author) (
この著者で検索
)
https://orcid.org/0000-0003-1081-9194
(unauthenticated)
SHINDO, Hiroyuki
;
OKA, Hiroyuki
(author) (
この著者で検索
)
https://orcid.org/0000-0002-1768-2429
NIMS Researchers Directory SAMURAI
OKA, Hiroyuki
;
MATSUMOTO, Yuji
(author) (
この著者で検索
)
https://orcid.org/0000-0003-4946-9574
(unauthenticated)
MATSUMOTO, Yuji
キーワード
polymer data
,
table
,
machine extraction
,
informatics
,
XML
刊行年月日
2021-01-01
更新時刻
2024-06-21 15:45:49 +0900
Estimation of valence state and growth rate using principal component analysis of plasma emission in reactive sputtering deposition
ジャーナル論文
著者
Rintaro Minami
(author) (
この著者で検索
)
University of Tsukuba a Department of Applied Physics
Rintaro Minami
;
Eiji Kita
(author) (
この著者で検索
)
Eiji Kita
;
Chiharu Mitsumata
(author) (
この著者で検索
)
Chiharu Mitsumata
;
Hideto Yanagihara
(author) (
この著者で検索
)
Hideto Yanagihara
キーワード
Machine learning
,
principal component analysis (PCA)
,
reactive magnetron sputtering
,
plasma emission spectrum
,
Mössbauer spectroscopy
刊行年月日
2025-12-31
更新時刻
2025-09-10 16:30:38 +0900
Electron doping of exfoliated multilayer graphene induced by dissociative H2 adsorption due to long-term exposure to 80-bar H2 gas
ジャーナル論文
著者
Hyun-Seok Jang
(author) (
この著者で検索
)
Incheon National University a Department of Physics
Hyun-Seok Jang
;
Younghun Kim
(author) (
この著者で検索
)
Younghun Kim
;
Heewoo Lee
(author) (
この著者で検索
)
Heewoo Lee
;
Soo Bong Choi
(author) (
この著者で検索
)
Soo Bong Choi
;
Jeongwoo Kim
(author) (
この著者で検索
)
Jeongwoo Kim
;
Byung Hoon Kim
(author) (
この著者で検索
)
Byung Hoon Kim
キーワード
Multilayer graphene
,
high H2 pressure
,
dissociative H2 adsorption
,
hydrogen electron-doped graphene
刊行年月日
2026-12-31
更新時刻
2026-02-10 12:30:21 +0900
キーワード
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RDEメタデータ定義
RDE送り状
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