ファイル種別: application/vnd.openxmlformats-officedocument.wordprocessingml.document キーワード: MEMS
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Maunscript (Clean).docx
Low-Energy Dissipation Diamond MEMS
ジャーナル論文
著者
Guo Chen (author) (この著者で検索)
;
Satoshi Koizumi (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Yasuo Koide (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Meiyong Liao (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
2024-09-27
更新時刻
2025-07-29 08:30:21 +0900
3-Abstract-WEN Liao.docx
High-quality Factor Diamond MEMS Resonators for Ultra-precise Thermometry
プレゼンテーション
著者
Wen Zhao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Guo Chen (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Zhaozong Zhang (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Satoshi KOIZUMI (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI ;
Meiyong Liao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI
キーワード
Diamond,, MEMS
刊行年月日
更新時刻
2026-01-09 11:00:08 +0900
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