Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy. Effects of Zalar Rotation and Liquid Nitrogen Cold Stage

論文

著者

Ogiwara, Toshiya ; Tanuma, Shigeo ; Nagasawa, Yuji ; Ikeo, Nobuyuki

キーワード

Auger Depth Profiling Analysis, InP/GaInAsP Multilayers, Zalar Rotation Method, Sample Cooling Method

刊行年月日

2011-06-10

更新時刻

2022-10-03 01:53:08 +0900