Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy. Effects of Zalar Rotation and Liquid Nitrogen Cold Stage

ジャーナル論文

著者

Ogiwara, Toshiya (author) (この著者で検索)

https://orcid.org/0000-0002-7376-6571

NIMS Researchers Directory SAMURAI

Ogiwara, Toshiya ;

Tanuma, Shigeo (author) (この著者で検索)

https://orcid.org/0000-0003-2628-9941

NIMS Researchers Directory SAMURAI

Tanuma, Shigeo ;

Nagasawa, Yuji (author) (この著者で検索)

Nagasawa, Yuji ;

Ikeo, Nobuyuki (author) (この著者で検索)

Ikeo, Nobuyuki

キーワード

Auger Depth Profiling Analysis, InP/GaInAsP Multilayers, Zalar Rotation Method, Sample Cooling Method

刊行年月日

2011-06-10

更新時刻

2022-10-03 01:53:08 +0900