File type: application/pdf Keyword: air bridge
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Fabrication of -Ga2O3 air-gap structures on 001 -Ga2O3 using HCl gas etching.pdf
Fabrication of β-Ga 2 O 3 /air-gap structures on (001) β-Ga 2 O 3 using HCl gas etching
Article
Creator
Takayoshi Oshima SAMURAI ORCID ; Yuichi Oshima SAMURAI ORCID
Keyword
β-Ga2O3, cantilever, air bridge, MEMS
Date published
2025-12-31
Updated at
2025-09-04 12:30:25 +0900
055207_1_5.0260753-2-8.pdf
Fabrication of air bridges on (100) β-Ga2O3 using crystallographic HCl gas etching
Article
Creator
Takayoshi Oshima SAMURAI ORCID ; Yuichi Oshima SAMURAI ORCID
Keyword
Ga2O3, HCl gas etching, air bridge
Date published
2025-05-01
Updated at
2025-05-07 12:30:22 +0900