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ジャーナル論文(2)
キーワード
surface roughness (2)
Auger depth profiling analysis (1)
InP/GaInAsP multilayer specimens (1)
atomic force microscope (1)
depth resolution function (1)
electrodeposited copper film (1)
machine learning (1)
(more)
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Creative Commons BY Attribution 4.0 International (1)
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application/pdf (2)
キーワード: surface roughness
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2 件のレコードが見つかりました。
Predicting the surface roughness of an electrodeposited copper film using a machine learning technique
ジャーナル論文
著者
Ryo Tamura
(author) (
この著者で検索
)
https://orcid.org/0000-0002-0349-358X
National Institute for Materials Science Center for Basic Research on Materials/Data-driven Materials Research Field/Data-driven Algorithm Team
NIMS Researchers Directory SAMURAI
Ryo Tamura
;
Ryuichi Inaba
(author) (
この著者で検索
)
MITSUBISHI MATERIALS CORPORATION
Ryuichi Inaba
;
Mami Watanabe
(author) (
この著者で検索
)
MITSUBISHI MATERIALS CORPORATION
Mami Watanabe
;
Yutaro Mori
(author) (
この著者で検索
)
MITSUBISHI MATERIALS CORPORATION
Yutaro Mori
;
Makoto Urushihara
(author) (
この著者で検索
)
MITSUBISHI MATERIALS CORPORATION
Makoto Urushihara
;
Kenji Yamaguchi
(author) (
この著者で検索
)
MITSUBISHI MATERIALS CORPORATION
Kenji Yamaguchi
;
Shoichi Matsuda
(author) (
この著者で検索
)
https://orcid.org/0000-0002-0640-3404
National Institute for Materials Science Research Center for Energy and Environmental Materials (GREEN)/Battery and Cell Materials Field/Automated Electrochemical Experiments Team
NIMS Researchers Directory SAMURAI
Shoichi Matsuda
キーワード
electrodeposited copper film
,
surface roughness
,
machine learning
刊行年月日
2024-12-31
更新時刻
2024-10-31 16:30:15 +0900
Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy, Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering
ジャーナル論文
著者
OGIWARA, Toshiya
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7376-6571
NIMS Researchers Directory SAMURAI
OGIWARA, Toshiya
;
TANUMA, Shigeo
(author) (
この著者で検索
)
https://orcid.org/0000-0003-2628-9941
NIMS Researchers Directory SAMURAI
TANUMA, Shigeo
キーワード
depth resolution function
,
InP/GaInAsP multilayer specimens
,
Auger depth profiling analysis
,
surface roughness
,
atomic force microscope
刊行年月日
2011-06-10
更新時刻
2022-10-03 01:24:02 +0900
キーワード
surface roughness
(2)
Auger depth profiling analysis
(1)
InP/GaInAsP multilayer specimens
(1)
atomic force microscope
(1)
depth resolution function
(1)
electrodeposited copper film
(1)
machine learning
(1)
RDEメタデータ定義
RDE送り状
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