Keyword: surface roughness
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Predicting the surface roughness of an electrodeposited copper film using a machine learning technique.pdf
Predicting the surface roughness of an electrodeposited copper film using a machine learning technique
Journal article
Creator
Ryo Tamura (author) (Search by this author)
Center for Basic Research on Materials/Data-driven Materials Research Field/Data-driven Algorithm Team, National Institute for Materials Science
ORCID SAMURAI ;
Ryuichi Inaba (author) (Search by this author)
MITSUBISHI MATERIALS CORPORATION
;
Mami Watanabe (author) (Search by this author)
MITSUBISHI MATERIALS CORPORATION
;
Yutaro Mori (author) (Search by this author)
MITSUBISHI MATERIALS CORPORATION
;
Makoto Urushihara (author) (Search by this author)
MITSUBISHI MATERIALS CORPORATION
;
Kenji Yamaguchi (author) (Search by this author)
MITSUBISHI MATERIALS CORPORATION
;
Shoichi Matsuda (author) (Search by this author)
Research Center for Energy and Environmental Materials (GREEN)/Battery and Cell Materials Field/Automated Electrochemical Experiments Team, National Institute for Materials Science
ORCID SAMURAI
Keyword
electrodeposited copper film, surface roughness, machine learning
Date published
2024-12-31
Updated at
2024-10-31 16:30:15 +0900
表面科学_17_1996_758.pdf
Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy, Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering
Journal article
Creator
ORCID SAMURAI ; ORCID SAMURAI
Keyword
depth resolution function, InP/GaInAsP multilayer specimens, Auger depth profiling analysis, surface roughness, atomic force microscope
Date published
2011-06-10
Updated at
2022-10-03 01:24:02 +0900