Arイオンスパッタリングされた各種化合物半導体表面のSEM観察

Journal article

Creator

Ogiwara, Toshiya (author) (Search by this author)

https://orcid.org/0000-0002-7376-6571

NIMS Researchers Directory SAMURAI

Ogiwara, Toshiya ;

Tanuma, Shigeo (author) (Search by this author)

https://orcid.org/0000-0003-2628-9941

NIMS Researchers Directory SAMURAI

Tanuma, Shigeo

Keyword

argon ion sputtering, compound semiconductor, surface observation using a scanning electron microscope

Date published

1995-03-08

Updated at

2022-10-03 01:31:38 +0900