Electron Inelastic Scattering in Surface Analysis

Journal article

Creator

Shigeo Tanuma (author) (Search by this author)

https://orcid.org/0000-0003-2628-9941

運営室, 技術開発・共用部門

NIMS Researchers Directory SAMURAI

Shigeo Tanuma

Keyword

IMFP, inelastic mean free path, dielectric function model, energy loss function, modified Bethe equation

Date published

2023-05-10

Updated at

2024-01-05 22:12:24 +0900