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代替タイトル: Electron inelastic scattering in Surface Analysis

説明:

This paper describes the recent progress in electron inelastic mean free paths (IMFPs) calculations with the dielectric response function and the optical energy loss function (ELF) as key parameters. As a result, it has been found that for most materials, the IMFP values calculated by the various calculation algorithms agreed well each other in the energy region above 300 eV. However, there is a large difference in the energies under 200 eV. The energy dependence of IMFPs calculated from optical ELFs could be expressed by the modified Bethe equation in the energies between 50 eV and 200 keV. The material dependence of IMFPs could be expressed by the TPP -2M equation. For IMFP calculations, the treatments and evaluations of the electron exchange effect, the effect of energy gap in the energy loss function, and the associated integral region also remain important issues to be addressed in the future.

権利情報:

• Creative Commons BY-NC Attribution-NonCommercial 4.0 International
  

キーワード: IMFP, electron inelastic mean free path, dielectric function model, energy loss function, modified Bethe equation

刊行年月日: 2023-05-10

出版者: Surface Science Society Japan

掲載誌:

• Vacuum and Surface Science (ISSN: 24335843) vol. 66 issue. 5 p. 292-298

研究助成金:

原稿種別: 著者最終稿 (Accepted manuscript)

MDR DOI: https://doi.org/10.48505/nims.3962

公開URL: https://doi.org/10.1380/vss.66.292

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更新時刻: 2024-01-05 22:13:05 +0900

MDRでの公開時刻: 2023-05-12 14:32:55 +0900