Fabrication of β-Ga ₂ O ₃ /air-gap structures on (001) β-Ga ₂ O ₃ using HCl gas etching

Journal article

Creator

Takayoshi Oshima (author) (Search by this author)

https://orcid.org/0000-0001-8550-9735

NIMS Researchers Directory SAMURAI

Takayoshi Oshima ;

Yuichi Oshima (author) (Search by this author)

https://orcid.org/0000-0001-8293-4891

NIMS Researchers Directory SAMURAI

Yuichi Oshima

Keyword

β-Ga2O3, cantilever, air bridge, MEMS

Date published

2025-12-31

Updated at

2025-09-04 12:30:25 +0900