Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy. Effects of Zalar Rotation and Liquid Nitrogen Cold Stage

Journal article

Creator

Ogiwara, Toshiya (author) (Search by this author)

https://orcid.org/0000-0002-7376-6571

NIMS Researchers Directory SAMURAI

Ogiwara, Toshiya ;

Tanuma, Shigeo (author) (Search by this author)

https://orcid.org/0000-0003-2628-9941

NIMS Researchers Directory SAMURAI

Tanuma, Shigeo ;

Nagasawa, Yuji (author) (Search by this author)

Nagasawa, Yuji ;

Ikeo, Nobuyuki (author) (Search by this author)

Ikeo, Nobuyuki

Keyword

Auger Depth Profiling Analysis, InP/GaInAsP Multilayers, Zalar Rotation Method, Sample Cooling Method

Date published

2011-06-10

Updated at

2022-10-03 01:53:08 +0900