InP/GaInAs多層膜のAES深さ方向分析のラウンドロビン試験報告（I）

Journal article

Creator

Ogiwara, Toshiya (author) (Search by this author)

https://orcid.org/0000-0002-7376-6571

NIMS Researchers Directory SAMURAI

Ogiwara, Toshiya ;

Tanuma, Shigeo (author) (Search by this author)

https://orcid.org/0000-0003-2628-9941

NIMS Researchers Directory SAMURAI

Tanuma, Shigeo

Keyword

Auger Depth Profiling Analysis, InP/GaInAs Specimen, Round Robin Test

Date published

1995-11-16

Updated at

2022-10-03 01:55:14 +0900