2 records found.
Surface Modification for High Reliability and Reversible Hybrid Interconnection
- Conference poster
- Creator
-
Akitsu Shigetou (author) (Search by this author)Research Center for Materials Nanoarchitectonics (MANA)/Semiconductor Materials Field/Smart Interface Team, National Institute for Materials Science
- Keyword
- Hybrid bonding, Cu, Solid state debonding
- Date published
- Updated at
- 2026-01-21 09:20:22 +0900
Surface Modification for High-Reliability and Multi-Functional Hybrid Interconnections
- Conference presentation
- Creator
-
Akitsu Shigetou (author) (Search by this author)Research Center for Materials Nanoarchitectonics (MANA)/Semiconductor Materials Field/Smart Interface Team, National Institute for Materials Science
- Keyword
- Low temperature bonding, Electronics packaging, VUV, Hybrid bonding
- Date published
- Updated at
- 2026-01-20 17:12:48 +0900