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Article and Dataset
Collection
MDR lattice thermal conductivity calculation database(2)
MDR phonon calculation database(2)
Thermophysical Property Original Datasets(1)
MDR XAFS DB(1)
Resource type
Journal article(30)
Dataset(6)
Book(1)
Keyword
Ga2O3 (37)
HVPE (6)
TMAH (4)
HCl gas etching (3)
dislocation (3)
(011) (2)
ELO (2)
Lattice thermal conductivity (2)
Phonon (2)
Superlattice (2)
(more)
License
Creative Commons BY Attribution 4.0 International (20)
In Copyright (8)
Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International (7)
Creative Commons BY-NC Attribution-NonCommercial 4.0 International (1)
Creative Commons BY-NC-SA Attribution-NonCommercial-ShareAlike 4.0 International (1)
File type
application/pdf (25)
application/vnd.openxmlformats-officedocument.wordprocessingml.document (7)
image/png (5)
application/x-xz (4)
application/zip (2)
text/x-log (2)
application/json (1)
application/octet-stream (1)
text/plain (1)
text/tab-separated-values (1)
Chemical composition
Gallium(III) Oxide (1)
Ga2O3 (1)
Analysis field
spectroscopy (1)
Measurement method
dynamic mechanical analysis (1)
x-ray absorption spectroscopy (1)
Material type
Oxide (1)
Structural feature for specimen
melt (1)
local structure (1)
Keyword: Ga2O3
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37 records found.
HCl-based halide vapor phase epitaxy and selective-area HCl gas etching of (−112) β-Ga
2
O
3
Journal article
Creator
Takayoshi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Yuichi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
Keyword
Ga2O3
,
(−112)
,
HVPE
,
HCl gas etching
Date published
2026-12-31
Updated at
2026-07-16 10:12:49 +0900
(110)- and (−134)-faceted surface morphology of halide vapor phase epitaxy-grown
β-
Ga
2
O
3
homoepitaxial layers on (011) substrates
Journal article
Creator
Takayoshi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Yuichi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
Keyword
Ga2O3
,
(011)
,
AFM
,
TEM
Date published
2026-07-15
Updated at
2026-07-09 10:29:39 +0900
Wet etching of (−102) β-Ga
2
O
3
with tetramethylammonium hydroxide (TMAH)
Journal article
Creator
Takayoshi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
Keyword
Ga2O3
,
wet etching
,
TMAH
Date published
2026-12-31
Updated at
2026-06-11 15:11:01 +0900
High Schottky barrier formation in tilted-dipole PdCoO2/
β
-Ga2O3 (001) interfaces
Journal article
Creator
Takayuki Harada
(author) (
Search by this author
)
https://orcid.org/0000-0002-8657-2258
NIMS Researchers Directory SAMURAI
Takayuki Harada
;
Takuro Nagai
(author) (
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)
https://orcid.org/0000-0001-5239-3334
NIMS Researchers Directory SAMURAI
Takuro Nagai
;
Kohei Sasaki
(author) (
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)
https://orcid.org/0000-0002-8923-7703
(unauthenticated)
Kohei Sasaki
Keyword
Thin film
,
Ga2O3
,
Delafossite
,
Power devices
,
Schottky
Date published
2026-06-01
Updated at
2026-06-10 14:51:59 +0900
Tetramethylammonium hydroxide (TMAH) treatment of dry-etched trenches on (010) β-Ga2O3 to enhance trench profiles
Journal article
Creator
Takayoshi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
Keyword
Ga2O3
,
TMAH
Date published
2026-02-01
Updated at
2026-02-25 12:30:03 +0900
Halide vapor phase epitaxy of a thick
c
-plane α-Ga2O3 film on a high-quality α-Cr2O3/sapphire template
Journal article
Creator
Yuichi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
;
Takayoshi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Shiyu Xiao
(author) (
Search by this author
)
https://orcid.org/0009-0007-0382-0396
(unauthenticated)
Shiyu Xiao
;
Kazuto Murakami
(author) (
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)
Kazuto Murakami
;
Katsuhiro Imai
(author) (
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)
Katsuhiro Imai
;
Takahiro Tomita
(author) (
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)
Takahiro Tomita
Keyword
Ga2O3
,
HVPE
,
Cr2O3
Date published
2026-02-21
Updated at
2026-02-18 16:30:15 +0900
Mapping primary crystallographic planes in
β
-Ga
2
O
3
based on a pseudo-cubic oxygen sublattice
Journal article
Creator
Takayoshi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
Keyword
Ga2O3
,
fcc
Date published
2026-02-16
Updated at
2026-02-18 16:30:08 +0900
First-principles lattice thermal conductivity calculation for Ga2O3 / C2/m (12) / materials id 886
Dataset
Collection
MDR lattice thermal conductivity calculation database
Creator
Atsushi Togo
(author) (
Search by this author
)
https://orcid.org/0000-0001-8393-9766
Center for Basic Research on Materials, National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Atsushi Togo
Keyword
Lattice thermal conductivity
,
Ga2O3
Date published
Updated at
2026-01-24 14:36:41 +0900
First-principles lattice thermal conductivity calculation for Ga2O3 / R-3c (167) / materials id 1243
Dataset
Collection
MDR lattice thermal conductivity calculation database
Creator
Atsushi Togo
(author) (
Search by this author
)
https://orcid.org/0000-0001-8393-9766
Center for Basic Research on Materials, National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Atsushi Togo
Keyword
Lattice thermal conductivity
,
Ga2O3
Date published
Updated at
2026-01-24 12:32:36 +0900
Rapid homoepitaxial growth of (011) β-Ga
2
O
3
by HCl-based halide vapor phase epitaxy
Journal article
Creator
Yuichi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
;
Takayoshi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
Keyword
Ga2O3
,
HVPE
Date published
2025-12-31
Updated at
2025-11-28 08:30:04 +0900
Keyword
Ga2O3
(37)
HVPE
(6)
TMAH
(4)
HCl gas etching
(3)
dislocation
(3)
(011)
(2)
ELO
(2)
Lattice thermal conductivity
(2)
Phonon
(2)
Superlattice
(2)
etching
(2)
selective area growth
(2)
wet etching
(2)
(-102)
(1)
(−112)
(1)
AFM
(1)
Aichi SR
(1)
BL5S1
(1)
C2/m (12)
(1)
Ceramic
(1)
Cr2O3
(1)
Delafossite
(1)
Density
(1)
Electrostatic Levitation
(1)
Ga K-edge
(1)
Gallium(III) Oxide
(1)
HCl
(1)
ISS-ELF
(1)
MEMS
(1)
NiO
(1)
Oxide
(1)
Power devices
(1)
R-3c (167)
(1)
Schottky
(1)
Si(111)
(1)
TEM
(1)
Thin film
(1)
Transistor
(1)
Wet etching
(1)
XAFS
(1)
air bridge
(1)
anisotropic etching
(1)
b-Ga2O3
(1)
collection - MDR XAFS DB
(1)
collection - Thermophys Datasets
(1)
crystallographic etching
(1)
dopant
(1)
epitaxial relationship
(1)
epitaxy
(1)
fcc
(1)
forming gas
(1)
lithography
(1)
plasma-free
(1)
plasma-free process
(1)
power device
(1)
selective area etching
(1)
κ-Ga2O3
(1)
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