High-Sensitivity and High-Depth Resolution Auger Depth Profiling Using an Inclined Holder based on Geometric Characteristics of Auger Electron Spectroscopy Apparatus Equipped with Concentric Hemispherical Analyzer

ジャーナル論文

著者

Tanuma, Shigeo (author) (この著者で検索)

https://orcid.org/0000-0003-2628-9941

NIMS Researchers Directory SAMURAI

Tanuma, Shigeo ;

Ogiwara, Toshiya (author) (この著者で検索)

https://orcid.org/0000-0002-7376-6571

NIMS Researchers Directory SAMURAI

Ogiwara, Toshiya ;

Kim, Kyung Joong (author) (この著者で検索)

https://orcid.org/0000-0001-5559-9784 (unauthenticated)

Kim, Kyung Joong ;

Nagatomi, Takaharu (author) (この著者で検索)

https://orcid.org/0000-0002-3629-638X (unauthenticated)

Nagatomi, Takaharu

キーワード

Auger Depth Profiling Analysis, Si/Ge multiple delta-doped layers, GaAs/AlAs Superlattice, Inclined Holder

刊行年月日

2016-04-03

更新時刻

2024-01-05 22:13:47 +0900