Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam

ジャーナル論文

著者

OGIWARA, Toshiya (author) (この著者で検索)

https://orcid.org/0000-0002-7376-6571

NIMS Researchers Directory SAMURAI

OGIWARA, Toshiya ;

HARADA, Tomoko (author) (この著者で検索)

HARADA, Tomoko ;

TANUMA, Shigeo (author) (この著者で検索)

https://orcid.org/0000-0003-2628-9941

NIMS Researchers Directory SAMURAI

TANUMA, Shigeo

キーワード

Auger Depth Profiling Analysis, InP/GaInAsP Multilayer Specimen, Argon Ion Spot Beam

刊行年月日

2011-06-10

更新時刻

2022-10-03 02:04:45 +0900