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説明:

In this paper, the development of diamond‐based MEMS/NEMS from the viewpoints of classic devices to quantum systems are reviewed. The fabrication process and the classic applications of diamond MEMS/NEMS devices are first described, including those from micro‐crystalline, nano‐crystalline/ultranano‐crystalline, and single‐crystalline diamonds. Then, the physical properties of nitrogen‐vacancy defect center, as well as the application referred to the hybrid system composed of MEMS structures and nitrogen‐vacancy centers embedded, strain–spin interaction, and diamond‐based optomechanics are introduced. Finally, a conclusion and outlook are presented. It is expected that diamond MEMS/NEMS is not only an ideal platform for high‐performance and high‐reliability advanced classic MEMS devices but also for quantum sensing, information, and exploring the fundamentals of quantum mechanics.

権利情報:

• In Copyright
  This is the peer reviewed version of the following article: Diamond MEMS: From Classical to Quantum, which has been published in final form at https://doi.org/10.1002/qute.202300189. This article may be used for non-commercial purposes in accordance with Wiley Terms and Conditions for Use of Self-Archived Versions. This article may not be enhanced, enriched or otherwise transformed into a derivative work, without express permission from Wiley or by statutory rights under applicable legislation. Copyright notices must not be removed, obscured or modified. The article must be linked to Wiley’s version of record on Wiley Online Library and any embedding, framing or otherwise making available the article or pages thereof by third parties from platforms, services and websites other than Wiley Online Library must be prohibited.

キーワード: Diamond, MEMS, sensors, quantum

刊行年月日: 2023-08-29

出版者: Wiley

掲載誌:

• Advanced Quantum Technologies (ISSN: 25119044) vol. 6 issue. 11 2300189

研究助成金:

原稿種別: 著者最終稿 (Accepted manuscript)

MDR DOI: https://doi.org/10.48505/nims.4422

公開URL: https://doi.org/10.1002/qute.202300189

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更新時刻: 2024-08-29 08:30:31 +0900

MDRでの公開時刻: 2024-08-29 08:30:31 +0900