@misc{huanying2023a,
  title = {Diamond MEMS: From Classical to Quantum},
  author = {Huanying Sun, Zilong Zhang, Yulong Liu, Guo Chen, Tiefu Li, Meiyong Liao},
  publisher = {Wiley},
  year = {2023-08-29},
  keywords = {Diamond, MEMS, sensors, quantum}
}