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This study presents a novel method for extracting inelastic mean free paths (IMFPs) of electrons in solids from the backscattered electron spectrum (BES) using iterative Monte Carlo simulations. In our approach, the IMFP is parameterized using the Tanuma–Powell–Penn (TPP-2M) formula and a classical trajectory Monte Carlo simulation is used to model electron transport processes and generate a theoretical BES. Through an iterative process, we optimize the TPP parameters to achieve the best fit between the simulated and experimental spectra over a wide energy range. This method was applied to determine the IMFPs of 25 targets, such as C (graphite), Mg, Al (100), Al (111), Si, Ti, V, Cr, Fe, Co, Ni, Cu (100), Cu (110), Cu (111), Mo, Ru, Rh, Ag, Sn, W, Re, Ir, Pt, Au, and Bi, in the energy range from 200 to 4900 eV, using a comprehensive experimental BES data set. The results demonstrate that the IMFPs

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• Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International
  

Keyword: electron inelastic mean free paths

Date published: 2025-11-21

Publisher: AIP Publishing

Journal:

• Journal of Applied Physics (ISSN: 00218979) vol. 138 issue. 19 195301

Funding:

• Japan Society for the Promotion of Science JP21K14656
• Kurata Grants from the Hitachi Global Foundation and the Iketani Science & Technology Foundation
• National Key Research and Development Program of China 2022YFB4401602
• 111 Project B16042

Manuscript type: Publisher's version (Version of record)

MDR DOI:

First published URL: https://doi.org/10.1063/5.0302645

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Updated at: 2025-12-22 11:15:22 +0900

Published on MDR: 2025-12-22 12:21:53 +0900