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Description:

The aberrations of the objective lens should be measured and adjusted to realize high spatial resolution in scanning transmission electron microscopy (STEM). Here we report a method of measuring low-order aberrations using the Fourier transforms of Ronchigrams of an arbitrary crystal such as a specimen of interest. We have applied this technique to measure first and second-order geometrical aberrations using typical standard specimens. Focus and twofold astigmatism are measured using two Ronchigrams obtained under different foci. Axial coma and threefold astigmatism are evaluated using the Fourier transforms of small subareas of a Ronchigram. The time dependences of focus and twofold astigmatism are examined using this technique for an aberration-corrected microscope.

Rights:

• Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International
  

  Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International

Keyword: STEM, alignment, Ronchigram, Aberration

Date published: 2017-03-18

Publisher: Elsevier BV

Journal:

• Ultramicroscopy (ISSN: 03043991) vol. 180 p. 59-65

Funding:

• JST JPMJCR0603 (CREST ソフトマターの分子・原子レベルでの観察を可能にする低加速高感度電子顕微鏡開発（代表者末永和知）)

Manuscript type: Author's version (Accepted manuscript)

MDR DOI: https://doi.org/10.48505/nims.3706

First published URL: https://doi.org/10.1016/j.ultramic.2017.03.021

Related item:

• is_version_of
• (dataset)
• https://doi.org/10.1016/j.ultramic.2017.03.021

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Updated at: 2024-01-05 22:13:14 +0900

Published on MDR: 2022-08-02 15:17:13 +0900