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説明:

The aberrations of the objective lens should be measured and adjusted to realize high spatial resolution in scanning transmission electron microscopy (STEM). Here we report a method of measuring low-order aberrations using the Fourier transforms of Ronchigrams of an arbitrary crystal such as a specimen of interest. We have applied this technique to measure first and second-order geometrical aberrations using typical standard specimens. Focus and twofold astigmatism are measured using two Ronchigrams obtained under different foci. Axial coma and threefold astigmatism are evaluated using the Fourier transforms of small subareas of a Ronchigram. The time dependences of focus and twofold astigmatism are examined using this technique for an aberration-corrected microscope.

権利情報:

• Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International
  Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International

キーワード: STEM, alignment, Ronchigram, Aberration

刊行年月日: 2017-03-18

出版者: Elsevier BV

掲載誌:

• Ultramicroscopy (ISSN: 03043991) vol. 180 p. 59-65

研究助成金:

• JST JPMJCR0603 (CREST ソフトマターの分子・原子レベルでの観察を可能にする低加速高感度電子顕微鏡開発（代表者末永和知）)

原稿種別: 著者最終稿 (Accepted manuscript)

MDR DOI: https://doi.org/10.48505/nims.3706

公開URL: https://doi.org/10.1016/j.ultramic.2017.03.021

関連資料:

• is_version_of
• (dataset)
• https://doi.org/10.1016/j.ultramic.2017.03.021

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更新時刻: 2024-01-05 22:13:14 +0900

MDRでの公開時刻: 2022-08-02 15:17:13 +0900