Bayesian inference method utilizing SESSA in quantitative layer structure estimation from XPS data

Atsushi Machida; Kenji Nagata; Ryo Murakami; Hiroshi Shinotsuka; Hayaru Shouno; Hideki Yoshikawa; Masato Okada

doi:10.1016/j.elspec.2024.147449

論文 Bayesian inference method utilizing SESSA in quantitative layer structure estimation from XPS data

Atsushi Machida ; Kenji Nagata (National Institute for Materials Science) ; Ryo Murakami (National Institute for Materials Science) ; Hiroshi Shinotsuka (National Institute for Materials Science) ; Hayaru Shouno ; Hideki Yoshikawa (National Institute for Materials Science) ; Masato Okada

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Atsushi Machida, Kenji Nagata, Ryo Murakami, Hiroshi Shinotsuka, Hayaru Shouno, Hideki Yoshikawa, Masato Okada. Bayesian inference method utilizing SESSA in quantitative layer structure estimation from XPS data. Journal of Electron Spectroscopy and Related Phenomena. 2024, 273 (), 147449. https://doi.org/10.1016/j.elspec.2024.147449

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(abstract)

We propose a method that combines Bayesian inference with simulation of electron spectra for surface analysis (SESSA) to infer layer structures from XPS data. SESSA simulates XPS spectra for specified compositions and microstructures, producing highly reproducible results. Our method estimates the layer structure based on posterior probability distributions, applicable to both wide-scan and narrow-scan data without angle resolution. This approach allows for quantitative analysis of layer structure information in XPS measurements.

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